Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10759344 | External mirror device | Koji Okabe, Junpei Yamashita | 2020-09-01 |
| 10714373 | Electrostatic chuck and wafer processing apparatus | Kazuki Anada, Takuma Wada | 2020-07-14 |
| 10607874 | Electrostatic chuck | Kengo Maehata, Shumpei KONDO, Hitoshi Sasaki, Kosuke Yamaguchi | 2020-03-31 |