Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10604841 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2020-03-31 |