Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679845 | Substrate processing apparatus having cooling member | Hiroaki Inadomi, Satoshi Biwa | 2020-06-09 |
| 10593571 | Substrate processing apparatus | Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Biwa +4 more | 2020-03-17 |