Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692698 | Feedback control by RF waveform tailoring for ion energy distribution | David J. Coumou, Yuriy Elner, Daniel M. Gill, Richard Pham | 2020-06-23 |
| 10666206 | Supervisory control of radio frequency (RF) impedance tuning operation | David J. Coumou, Yuriy Elner, Daniel M. Gill | 2020-05-26 |
| 10546724 | Pulsed, bidirectional radio frequency source/load | Aaron T. Radomski, Ky Thoai Luu, Larry J. Fisk, II, Matthew G. Harrington, Amish Rughoonundon +2 more | 2020-01-28 |