Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692698 | Feedback control by RF waveform tailoring for ion energy distribution | David J. Coumou, Ross REINHARDT, Yuriy Elner, Daniel M. Gill | 2020-06-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692698 | Feedback control by RF waveform tailoring for ion energy distribution | David J. Coumou, Ross REINHARDT, Yuriy Elner, Daniel M. Gill | 2020-06-23 |