Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692698 | Feedback control by RF waveform tailoring for ion energy distribution | David J. Coumou, Ross REINHARDT, Yuriy Elner, Richard Pham | 2020-06-23 |
| 10666206 | Supervisory control of radio frequency (RF) impedance tuning operation | David J. Coumou, Ross REINHARDT, Yuriy Elner | 2020-05-26 |