Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755893 | Charged particle beam writing method and charged particle beam writing apparatus | Takahito Nakayama | 2020-08-25 |
| 10622186 | Charged particle beam writing apparatus and charged particle beam writing method | Takuya Uemura, Takashi Nakamura, Hideki Matsui, Munehiro Ogasawara, Tatsuya MUROFUSHI +1 more | 2020-04-14 |
| 10586682 | Method of obtaining beam deflection shape and method of obtaining arrangement angle of blanking aperture array plate | Shunsuke ISAJI | 2020-03-10 |