Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755893 | Charged particle beam writing method and charged particle beam writing apparatus | Rieko Nishimura | 2020-08-25 |
| 10553396 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2020-02-04 |