Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685819 | Measuring concentrations of radicals in semiconductor processing | Tom K. Cho, George Alajajian, Michael J. Mark | 2020-06-16 |
| 10656100 | Surface acoustic wave sensors in semiconductor processing equipment | Simon Yavelberg, Zubin Huang | 2020-05-19 |