Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more | 2020-10-06 |
| 10790140 | High deposition rate and high quality nitride | Xinhai Han, Deenesh Padhi, Yinan Zhang, Shaunak Mukherjee | 2020-09-29 |