Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790140 | High deposition rate and high quality nitride | Xinhai Han, Deenesh Padhi, Masaki Ogata, Yinan Zhang | 2020-09-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790140 | High deposition rate and high quality nitride | Xinhai Han, Deenesh Padhi, Masaki Ogata, Yinan Zhang | 2020-09-29 |