Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10691026 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Osamu Tanitsu, Hirohisa Tanaka, Takashi Mori | 2020-06-23 |
| 10564550 | Illumination optical assembly, exposure device, and device manufacturing method | Norio Miyake | 2020-02-18 |