Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802258 | Microscope including an illumination optical system having a plurality of lens elements | Fumio Suzuki, Hiroaki Nakayama | 2020-10-13 |
| 10564550 | Illumination optical assembly, exposure device, and device manufacturing method | Kinya Kato | 2020-02-18 |