Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768409 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2020-09-08 |
| 10691026 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Hirohisa Tanaka, Kinya Kato, Takashi Mori | 2020-06-23 |