Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527407 | In-situ metrology method for thickness measurement during PECVD processes | Edward W. Budiarto, Todd Egan, Mehdi Vaez-Iravani, Jeongmin Lee, Dale R. Du Bois +1 more | 2020-01-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527407 | In-situ metrology method for thickness measurement during PECVD processes | Edward W. Budiarto, Todd Egan, Mehdi Vaez-Iravani, Jeongmin Lee, Dale R. Du Bois +1 more | 2020-01-07 |