Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815561 | Method and apparatus for asymmetric selective physical vapor deposition | Joung Joo Lee, Bencherki Mebarki, Xianmin Tang, Sree Rangasai V. Kesapragada, Sudarsan Srinivasan | 2020-10-27 |
| 10727092 | Heated substrate support ring | — | 2020-07-28 |
| 10697057 | Collimator for use in a physical vapor deposition chamber | Goichi Yoshidome, Hamid Tavassoli, Andrew John Tomko | 2020-06-30 |