Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663491 | Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same | Zheng John Ye, Juan Carlos Rocha, Abdul Aziz Khaja | 2020-05-26 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2020-03-03 |