Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879087 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yasuhito Yoshimizu, Yuya Akeboshi, Fuyuma Ito | 2020-12-29 |
| 10804221 | Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate | Fuyuma Ito, Yasuhito Yoshimizu | 2020-10-13 |