Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi +5 more | 2020-11-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi +5 more | 2020-11-03 |