Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN | 2020-09-08 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Kong CHAN +1 more | 2020-08-11 |
| D877784 | Plasma outlet liner | Yanjun Xia, Kartik Shah | 2020-03-10 |
| 10571337 | Thermal cooling member with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more | 2020-02-25 |