Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790174 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Richard H. Gould, Klay Kunkel | 2020-09-29 |
| 10557197 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, John Daugherty | 2020-02-11 |