Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Keith Gaff, Alexander Matyushkin, Zhigang Chen, Keith Comendant | 2020-10-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Keith Gaff, Alexander Matyushkin, Zhigang Chen, Keith Comendant | 2020-10-13 |