Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854772 | Multi-piece substrate holder and alignment mechanism | Hoang Huy Vu, Babak Adibi | 2020-12-01 |
| 10752987 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Kevin Fairbairn, Robert Ruck +1 more | 2020-08-25 |
| 10679883 | Wafer plate and mask arrangement for substrate fabrication | Aaron Zanetto, William Eugene Runstadler, Jr., Terry Pederson | 2020-06-09 |
| 10559710 | System of height and alignment rollers for precise alignment of wafers for ion implantation | William Eugene Runstadler, Jr., Babak Adibi | 2020-02-11 |