Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811227 | Application of modulating supplies in a plasma processing system | Gideon Van Zyl, Denis Shaw | 2020-10-20 |
| 10811228 | Control of plasma processing systems that include plasma modulating supplies | Gideon Van Zyl, Denis Shaw | 2020-10-20 |
| 10811229 | Synchronization with a bias supply in a plasma processing system | Gideon Van Zyl, Denis Shaw | 2020-10-20 |
| 10752987 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Terry Bluck, Robert Ruck +1 more | 2020-08-25 |
| 10707055 | Spatial and temporal control of ion bias voltage for plasma processing | Denis Shaw, Daniel Carter | 2020-07-07 |
| 10607813 | Synchronized pulsing of plasma processing source and substrate bias | Denis Shaw, Daniel Carter | 2020-03-31 |