Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854772 | Multi-piece substrate holder and alignment mechanism | Hoang Huy Vu, Terry Bluck | 2020-12-01 |
| 10636935 | Ion implant system having grid assembly | Moon Chun | 2020-04-28 |
| 10559710 | System of height and alignment rollers for precise alignment of wafers for ion implantation | William Eugene Runstadler, Jr., Terry Bluck | 2020-02-11 |