Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10606164 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2020-03-31 |
| 10551734 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Osamu Nozawa | 2020-02-04 |