Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10606164 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2020-03-31 |
| 10571797 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Ryo Ohkubo | 2020-02-25 |
| 10551733 | Mask blanks, phase shift mask, and method for manufacturing semiconductor device | Atsushi Kominato | 2020-02-04 |
| 10551734 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2020-02-04 |
| 10539866 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Kazuya Sakai | 2020-01-21 |
| 10527931 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido, Yasushi Okubo | 2020-01-07 |