Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712655 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Yasutaka HORIGOME | 2020-07-14 |
| 10712652 | Mask blank having a resist layer, method for manufacturing mask blank having resist layer, and method for manufacturing transfer mask | Takahiro Hiromatsu, Seishi SHIBAYAMA | 2020-07-14 |
| 10606164 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2020-03-31 |
| 10571797 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2020-02-25 |
| 10551734 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2020-02-04 |
| 10539866 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Kazuya Sakai | 2020-01-21 |
| 10527931 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo, Yasushi Okubo | 2020-01-07 |