Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10642149 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE | 2020-05-05 |
| 10620527 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2020-04-14 |
| 10606166 | Substrate with electrically conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Takumi Kobayashi, Tatsuo Asakawa, Tsutomu Shoki | 2020-03-31 |
| 10527927 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Yoichi Usui | 2020-01-07 |