Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871707 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | — | 2020-12-22 |
| 10642149 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2020-05-05 |
| 10578961 | Mask blank substrate, multi-layer reflective film coated substrate, and mask blank | Masaru Tanabe | 2020-03-03 |