Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10606166 | Substrate with electrically conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tatsuo Asakawa, Tsutomu Shoki | 2020-03-31 |
| 10570528 | Apparatus and method for producing gallium oxide crystal | Keigo Hoshikawa, Etsuko Ohba, Jun Yanagisawa | 2020-02-25 |