Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635005 | Exposure apparatus, method thereof, and method of manufacturing article | Mitsuhide Nishimura, Masatoshi Endo | 2020-04-28 |
| 10558128 | Control device, lithography apparatus, and method of manufacturing article | Koji Yoshida, Mitsuhide Nishimura, Yoshihiro Omameuda | 2020-02-11 |