Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10558128 | Control device, lithography apparatus, and method of manufacturing article | Koji Yoshida, Junichi Motojima, Mitsuhide Nishimura | 2020-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10558128 | Control device, lithography apparatus, and method of manufacturing article | Koji Yoshida, Junichi Motojima, Mitsuhide Nishimura | 2020-02-11 |