Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635005 | Exposure apparatus, method thereof, and method of manufacturing article | Masatoshi Endo, Junichi Motojima | 2020-04-28 |
| 10558128 | Control device, lithography apparatus, and method of manufacturing article | Koji Yoshida, Junichi Motojima, Yoshihiro Omameuda | 2020-02-11 |