Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808381 | Lifting mechanism suspension and lifting mechanism | Christian Goebel, Edwin Harnischfeger, Rainer Biener, Wolfgang Hupp | 2020-10-20 |
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Ralf Moser, Arno Schmittner, Holger Kierey, Wolfgang Merkel, Georgo Metalidis | 2020-03-03 |