Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655276 | Method for producing or machining a roller, roller and functional layer of a roller | Wesley W. Brooks, Robert Eberhardt, Siegfried Graser, Franz Grohmann, Ting Nan Liu +3 more | 2020-05-19 |
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Florian Herold, Arno Schmittner, Holger Kierey, Wolfgang Merkel, Georgo Metalidis | 2020-03-03 |