Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Ralf Moser, Florian Herold, Holger Kierey, Wolfgang Merkel, Georgo Metalidis | 2020-03-03 |