Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852637 | Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film | Naoki Inoue, Kei Yamamoto, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2020-12-01 |
| 10578968 | Pattern forming method, resist pattern, and process for producing electronic device | Kei Yamamoto, Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2020-03-03 |