Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852637 | Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film | Naoki Inoue, Naohiro TANGO, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2020-12-01 |
| 10761426 | Pattern forming method, method for manufacturing electronic device, and laminate | Hideaki Tsubaki, Wataru Nihashi, Toru Tsuchihashi | 2020-09-01 |
| 10663864 | Pattern forming method, method for manufacturing electronic device, and laminate | Wataru Nihashi, Hideaki Tsubaki, Toru Tsuchihashi | 2020-05-26 |
| 10578968 | Pattern forming method, resist pattern, and process for producing electronic device | Naohiro TANGO, Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2020-03-03 |
| 10529643 | Semiconductor device and method of manufacturing the same | Hodaka ROKUBUICHI, Dai Nakajima, Kiyofumi Kitai, Yoichi Goto | 2020-01-07 |