Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816259 | Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method | Kenichi Suzuki, Kenichiro Saito | 2020-10-27 |
| 10661411 | Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface | Hiroshi Sotozaki, Takeshi Kodera, Ryo Hasegawa | 2020-05-26 |