Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10661411 | Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface | Ryuichi Kosuge, Hiroshi Sotozaki, Ryo Hasegawa | 2020-05-26 |