Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816259 | Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method | Kenichi Suzuki, Ryuichi Kosuge | 2020-10-27 |
| 10730162 | Turntable cloth peeling jig | Hiroshi Sotozaki, Tadakazu Sone | 2020-08-04 |