Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10681795 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2020-06-09 |
| 10635002 | Faceted EUV optical element | David C. Brandt, Igor V. Fomenkov | 2020-04-28 |