Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10681795 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, David Robert Evans | 2020-06-09 |
| 10615583 | In-ground enclosure system | Kevin T. Aycock, Robert J. Schilling, Marcela Torres, Kevin Goldstein, Walter Pierce | 2020-04-07 |