Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635002 | Faceted EUV optical element | Alexander I. Ershov, Igor V. Fomenkov | 2020-04-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635002 | Faceted EUV optical element | Alexander I. Ershov, Igor V. Fomenkov | 2020-04-28 |