Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10684466 | Mirror arrangement for lithography exposure apparatus and optical system comprising mirror arrangement | Richard Petrus Hogervorst, Petrus Theodorus Rutgers, Kerstin Hild, Toralf Gruner | 2020-06-16 |