Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852643 | Optical system, and method | Dirk Juergens, Bernd Geh | 2020-12-01 |
| 10684466 | Mirror arrangement for lithography exposure apparatus and optical system comprising mirror arrangement | Wouter Bernardus Johannes Hakvoort, Richard Petrus Hogervorst, Petrus Theodorus Rutgers, Toralf Gruner | 2020-06-16 |