Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Irene Ament, Stefan Schmidt, Moritz Becker, Stefan Wiesner +6 more | 2020-05-12 |
| 10642167 | Optical element | Michael Schall, Johannes Kraus, Oliver Gloeckl, Jeffrey Erxmeyer, Horst Feldermann +2 more | 2020-05-05 |
| 10578783 | Optical grating and optical assembly for same | Sebastian Brueck, Michael Gerhard | 2020-03-03 |