Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775691 | Method for examining photolithographic masks and mask metrology apparatus for performing the method | Dirk Hellweg, Markus Koch | 2020-09-15 |
| 10564551 | Method for determining a focus position of a lithography mask and metrology system for carrying out such a method | Markus Koch, Dirk Hellweg, Martin Dietzel | 2020-02-18 |