Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775691 | Method for examining photolithographic masks and mask metrology apparatus for performing the method | Markus Koch, Renzo Capelli | 2020-09-15 |
| 10761420 | Microlithographic mask, method for determining edge positions of the images of the structures of such a mask and system for carrying out such a method | — | 2020-09-01 |
| 10564551 | Method for determining a focus position of a lithography mask and metrology system for carrying out such a method | Markus Koch, Renzo Capelli, Martin Dietzel | 2020-02-18 |